Information Package / Course Catalogue
| Course Code | : ME429 |
| Course Type | : Area Elective |
| Couse Group | : First Cycle (Bachelor's Degree) |
| Education Language | : English |
| Work Placement | : N/A |
| Theory | : 3 |
| Prt. | : 0 |
| Credit | : 3 |
| Lab | : 0 |
| ECTS | : 5 |
The objective of the course is to help students explore the interdisciplinary field of micro/nano engineering, popularly referred to as "MEMS/NEMS" (micro/nano electromechanical systems).
Scaling laws, advantages and disadvantages of miniaturization, fundamentals of MEMS/NEMS fabrication and assembly, and applications of MEMS/NEMS will be covered in the scope of this course
| Assoc. Prof. Adem ÖZÇELİK |
| 1. | 1. To be able to understand basic physical and mechanical principles of micro and nano size systems |
| 2. | 2. To be able to design micro and nano devices using the MEMS/NEMS fabrication processes. |
| 3. | 3. To be able to select appropriate fabrication materials and understand their properties for MEMS/NEMS applications |
| 4. | 4. To be able to understand the fundamentals of nanotechnology and nanofabrication, and the interplay between MEMS/NEMS and nanosciences. |
| 5. | 5. To be able to apply a systematic MEMS/NEMS design approach to engineering projects and have strong research and design skill |
| 1. | 1. Marc J. Madou, From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications, 3rd Edition, CRC Press, 2011. |
| 2. | 2. Marc J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd Edition, CRC Press, 2002. |
| 3. | 3. Liu, C. Foundations of MEMS, Pearson Education: New Jersey, 2006. |
| Type of Assessment | Count | Percent |
|---|---|---|
| Midterm Examination | 1 | %20 |
| Final Examination | 1 | %50 |
| Assignment | 3 | %10 |
| Project | 1 | %20 |
| Activities | Count | Preparation | Time | Total Work Load (hours) |
|---|---|---|---|---|
| Lecture - Theory | 14 | 1 | 3 | 56 |
| Assignment | 3 | 5 | 0 | 15 |
| Project | 1 | 10 | 0 | 10 |
| Reading | 14 | 1 | 0 | 14 |
| Midterm Examination | 1 | 9 | 1 | 10 |
| Final Examination | 1 | 18 | 2 | 20 |
| TOTAL WORKLOAD (hours) | 125 | |||
PÇ-1 | PÇ-2 | PÇ-3 | PÇ-4 | PÇ-5 | PÇ-6 | PÇ-7 | PÇ-8 | PÇ-9 | PÇ-10 | PÇ-11 | PÇ-12 | |
OÇ-1 | 5 | 4 | 3 | 4 | 3 | 5 | 5 | 4 | 3 | 3 | 2 | 5 |
OÇ-2 | 5 | 5 | 4 | 4 | 3 | 3 | 4 | 5 | 4 | 5 | 5 | 5 |
OÇ-3 | 4 | 5 | 3 | 4 | 3 | 5 | 5 | 5 | 4 | 5 | 4 | 4 |
OÇ-4 | 5 | 5 | 4 | 5 | 4 | 3 | 3 | 4 | 4 | 5 | 5 | 4 |
OÇ-5 | 4 | 5 | 4 | 3 | 3 | 3 | 4 | 3 | 4 | 5 | 3 | 4 |