
| Course Code | : ME429 |
| Course Type | : Area Elective |
| Couse Group | : First Cycle (Bachelor's Degree) |
| Education Language | : English |
| Work Placement | : N/A |
| Theory | : 3 |
| Prt. | : 0 |
| Credit | : 3 |
| Lab | : 0 |
| ECTS | : 5 |
The objective of the course is to help students explore the interdisciplinary field of micro/nano engineering, popularly referred to as "MEMS/NEMS" (micro/nano electromechanical systems).
Scaling laws, advantages and disadvantages of miniaturization, fundamentals of MEMS/NEMS fabrication and assembly, and applications of MEMS/NEMS will be covered in the scope of this course