Information Package / Course Catalogue
| Course Code | : EE473 |
| Course Type | : Area Elective |
| Couse Group | : First Cycle (Bachelor's Degree) |
| Education Language | : English |
| Work Placement | : N/A |
| Theory | : 3 |
| Prt. | : 0 |
| Credit | : 3 |
| Lab | : 0 |
| ECTS | : 5 |
Learning, searching and presenting the fundamentals on thin film technologies and engineering applications.
Fundamentals of thin film physics; preparation of thin films: evaporation, sputtering, ion plating, CVD, electrochemical deposition; nucleation and growth of thin films, evaporation rate measurements, film thickness measurements; chemical analysis of thin films; mechanical electrical and optical properties; engineering applications
| 1. | To learn the fundamentals of vacuum technologies and gas kinetics |
| 2. | To learn the fundamentals of thin film fabrication techniques |
| 3. | To learn and be able to use thin film evaporation and deposition techniques |
| 4. | To learn the engineering applications of thin films |
| 5. | To learn and be able to use experimental equipments to measure mechanical, electrical and optical properties of thin films |
| 1. | Donald Smith, 2007, “Thin-Film Deposition: Principles and Practice”, Prentice Hall |
| 2. | Lecture notes and internet publishments |
| Type of Assessment | Count | Percent |
|---|---|---|
| Assignment | 1 | %5 |
| Project | 1 | %5 |
| Midterm Examination | 1 | %30 |
| Final Examination | 1 | %60 |
| Activities | Count | Preparation | Time | Total Work Load (hours) |
|---|---|---|---|---|
| Lecture - Theory | 14 | 1 | 3 | 56 |
| Assignment | 1 | 1 | 1 | 2 |
| Project | 1 | 1 | 1 | 2 |
| Individual Work | 14 | 3 | 0 | 42 |
| Midterm Examination | 1 | 5 | 2 | 7 |
| Final Examination | 1 | 13 | 3 | 16 |
| TOTAL WORKLOAD (hours) | 125 | |||
PÇ-1 | PÇ-2 | PÇ-3 | PÇ-4 | PÇ-5 | PÇ-6 | PÇ-7 | PÇ-8 | PÇ-9 | PÇ-10 | PÇ-11 | |
OÇ-1 | 3 | 1 | 1 | 1 | 3 | 3 | |||||
OÇ-2 | 3 | 1 | 1 | 1 | |||||||
OÇ-3 | 3 | 2 | 1 | 3 | |||||||
OÇ-4 | 1 | 1 | 1 | 3 | 2 | ||||||
OÇ-5 | 1 | 1 | 2 | ||||||||