To make an introduction to the preparation methods and characterization techniques of thin films.

The main topics to be discussed in this course; vacuum evaporation techniques, mean free path of vapour molecules, methods of thermal evaporation; resistive heating, laser evaporation, arc evaporation, radiofrequency heating, flash evaporation, electron beam evaporation, the emission characteristics of vapour sources and film thickness distribution, vacuum coating units; O-rings, valves, pumps and gauges of vacuum, vacuum evaporation sources; heating flaments and boats, substrates and their cleaning, the nucleation, growth ve structural properties in vacuum deposited films, sputtering techniques; magnetron, ion beam and AC sputtering, chemical deposition techniques, others deposition techniques, film thickness monitoring techniques and apparatus.