Information Package / Course Catalogue
Technology of Thin Films
Course Code: FZK518
Course Type: Area Elective
Couse Group: Second Cycle (Master's Degree)
Education Language: Turkish
Work Placement: N/A
Theory: 3
Prt.: 0
Credit: 3
Lab: 0
ECTS: 6
Objectives of the Course

To make an introduction to the preparation methods and characterization techniques of thin films.

Course Content

The main topics to be discussed in this course; vacuum evaporation techniques, mean free path of vapour molecules, methods of thermal evaporation; resistive heating, laser evaporation, arc evaporation, radiofrequency heating, flash evaporation, electron beam evaporation, the emission characteristics of vapour sources and film thickness distribution, vacuum coating units; O-rings, valves, pumps and gauges of vacuum, vacuum evaporation sources; heating flaments and boats, substrates and their cleaning, the nucleation, growth ve structural properties in vacuum deposited films, sputtering techniques; magnetron, ion beam and AC sputtering, chemical deposition techniques, others deposition techniques, film thickness monitoring techniques and apparatus.

Name of Lecturer(s)
Learning Outcomes
1.To be able to describe the basics of growth and material parameters of thin films.
2.To be able to recognize the various deposition methods and syntheses of various materials and be able to relate them to principles of fundamental physics
3.To be able to identify application areas according to difference between thick and thin films
4.To be able to give the examples of vacuum pumps and vacuum systems.
5.To be able to recognize the techniques used in structural, electrical and optical characterizations of thin films.
Recommended or Required Reading
1.Preparation of Thin Films, Joy George, Marcel Dekker, Inc., New York, 1992
2.Vacuum Deposition of Thin films, L. Holland, Chapman&Hall Ltd., London, 1961
3.Science and Technology of Thin Films, F. C. Matacotta and G. Ottaviani, World Scientific Publishing Co.Pte. Lte., London, 1995
4.Thin Film Phenomena, K. L. Chopra, McGraw-Hill, New York, 1969
Weekly Detailed Course Contents
Week 1 - Theoretical
Thin film definition and preparation methods
Week 1 - Preparation Work
The Optical Constants of Bulk Materials and Films (2nd Ed.), L Ward, Institute of Physics Publishing, Bristol-1994, pp.140-148.
Week 2 - Theoretical
Vacuum evaporation techniques
Week 2 - Preparation Work
Vacuum Deposition of Thin films, L. Holland, Chapman&Hall Ltd., London, 1961, pp.1-33
Week 3 - Theoretical
Mean free path of vapour molecules
Week 3 - Preparation Work
Preparation of Thin Films, Joy George, Marcel Dekker, Inc., New York, USA, 1992, pp.1-5.
Week 4 - Theoretical
Methods of thermal evaporation; resistive heating, laser evaporation, arc evaporation, Radiofrequency heating, flash evaporation, electron beam evaporation
Week 4 - Preparation Work
Preparation of Thin Films, Joy George, Marcel Dekker, Inc., New York, USA, 1992, pp.5-35.
Week 5 - Theoretical
The emission characteristics of vapour sources and film thickness distribution
Week 5 - Preparation Work
Vacuum Deposition of Thin films, L. Holland, Chapman&Hall Ltd., London, 1961, pp.141-168.
Week 6 - Theoretical
Vacuum coating units; O-rings, valves, pumps and gauges of vacuum
Week 6 - Preparation Work
Vacuum Deposition of Thin films, L. Holland, Chapman&Hall Ltd., London, 1961, pp..7-14
Week 7 - Theoretical
Vacuum evaporation sources; Heating flaments and boats
Week 7 - Preparation Work
Vacuum Deposition of Thin films, L. Holland, Chapman&Hall Ltd., London, 1961, pp..104-1121.
Week 8 - Theoretical
Substrates and their cleaning, Midterm
Week 9 - Theoretical
The nucleation, growth ve structural properties in thin films
Week 9 - Preparation Work
Vacuum Deposition of Thin films, L. Holland, Chapman&Hall Ltd., London, 1961, pp.199-205.
Week 10 - Theoretical
Sputtering techniques; magnetron, ion beam and AC sputtering
Week 10 - Preparation Work
Preparation of Thin Films, Joy George, Marcel Dekker, Inc., New York, USA, 1992, pp.41-93.
Week 11 - Theoretical
Chemical deposition techniques
Week 11 - Preparation Work
Preparation of Thin Films, Joy George, Marcel Dekker, Inc., New York, USA, 1992, pp.223-287.
Week 12 - Theoretical
Others deposition techniques
Week 12 - Preparation Work
Preparation of Thin Films, Joy George, Marcel Dekker, Inc., New York, USA, 1992, pp.335-350.
Week 13 - Theoretical
Film thickness monitoring techniques and apparatus
Week 13 - Preparation Work
Vacuum Deposition of Thin films, L. Holland, Chapman&Hall Ltd., London, 1961, pp.298-308.
Week 14 - Theoretical
The study techniques for the surface of thin films: AFM and Elektron microscopy
Week 14 - Preparation Work
Basics of Optics of Multilayer Systems, Sh A. Furman and A. V. Tikhonrsvov, ADAGP; Paris, France, pp.232-235.
Week 15 - Final Exam
Final exam
Assessment Methods and Criteria
Type of AssessmentCountPercent
Midterm Examination1%30
Final Examination1%70
Workload Calculation
ActivitiesCountPreparationTimeTotal Work Load (hours)
Lecture - Theory1463126
Midterm Examination19312
Final Examination19312
TOTAL WORKLOAD (hours)150
Contribution of Learning Outcomes to Programme Outcomes
PÇ-1
PÇ-2
PÇ-3
PÇ-4
PÇ-5
PÇ-6
PÇ-7
PÇ-8
OÇ-1
5
5
4
5
5
4
3
5
OÇ-2
2
4
1
4
4
3
3
5
OÇ-3
2
3
1
4
5
4
5
5
OÇ-4
5
4
3
5
4
3
1
5
OÇ-5
5
5
5
5
5
5
5
Adnan Menderes University - Information Package / Course Catalogue
2026